Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator
This is an early access version, the complete PDF, HTML, and XML versions will be available soon. Open AccessArticle by Mehdi Allameh 1,2,*, Byoungyoul Park 2 and Cyrus Shafai 1 1 Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 5V6, Canada 2 Quantum